A light-induced crosslinking strategy enables multi-color patterning of anti-opal hydrogel with a minimum line width of 15 μm, significantly enhancing information capacity. Control film crosslinking ...
Trends in advanced device fabrication require combined lithography-etching multi-patterning sequences and self-aligned multi-patterning to form devices’ finest features at subwavelength dimensions. As ...
As semiconductor technology advanced from 65nm to 7nm over the last 10 years, new challenges have arisen in design and manufacturing. Securing the IC yield means developing new methods that respond to ...
Si2 announced that Cadence has donated extensions to the OpenAccess community which enable physical design tools to represent Multi-Patterned Technology (MPT). Conventional photolithography cannot ...
OYAMA, Japan--(BUSINESS WIRE)--Gigaphoton, Inc. , a major lithography light source manufacturer, announced that the company will begin shipping the GT63A, the next-generation ArF excimer laser for ...
A light-induced crosslinking strategy enables multi-color patterning of anti-opal hydrogel with a minimum line width of 15 μm, significantly enhancing information capacity. Control film crosslinking ...
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